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Investigation of atomic layer deposited beryllium oxide material properties for high-k dielectric applications File

Koh, Donghyi , Yum, Jung-Hwan , Banerjee, Sanjay K. , Hudnall, Todd W. , Bielawski, Christopher , Lanford, William A. , French, Benjamin L. , French, Marc , Henry, Patrick , Li, Han , et al

Article Issue Date2014-05 View80
Study of the Effect of Pinning Particles on Grain Size Distributions File

Li, Han , Lee, Sukbin , Rollett, Anthony D.

Article Issue Date2013-03 View86
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