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Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant File

Jung, Jae-Hun , Lee, Seung-Joon , Lee, Hyun-Jung , Lee, Min Young , Cheon, Taehoon , Bae, So Ik , Saito, Masayuki , Suzuki, Kazuharu , Nabeya, Shunichi , Lee, Jeongyeop , et al

Article Issue Date2015-11 View46
Cu2O quantum dots emitting visible light grown by atomic layer deposition File

Lee, Min Young , Kim, Soo-Hyun , Park, Il-Kyu

Article Issue Date2016-11 View30
Highly-conformal p-type copper(I) oxide (Cu2O) thin films by atomic layer deposition using a fluorine-free amino-alkoxide precursor File

Kim, Hangil , Lee, Min Young , Kim, Soo-Hyun , Bae, So Ik , Ko, Kyung Yong , Kim, Hyungjun , Kwon, Kyeong-Woo , Hwang, Jin-Ha , Lee, Do-Joong

Article Issue Date2015-09 View45
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