2020-06 | Ultralow-dielectric-constant amorphous boron nitride | Hong, Seokmo; Lee, Chang-Seok; Lee, Min-Hyun; Lee, Yeongdong; Ma, Kyung Yeol; Kim, Gwangwoo; Yoon, Seong In; Ihm, Kyuwook; Kim, Ki-Jeong; Shin, Tae Joo; Kim, Sang Won; Jeon, Eun-chae; Jeon, Hansol; Kim, Ju-Young; Lee, Hyung-Ik; Lee, Zonghoon; Antidormi, Aleandro; Roche, Stephan; Chhowalla, Manish; Shin, Hyeon-Jin; Shin, Hyeon Suk | ARTICLE | 1041 |