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Issue Date | Title | Author(s) | Type | View |
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2020-05 | Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes | Lee, Jae Hwan; Park, Bo-Eun; Thompson, David; Choe, Myeonggi; Lee, Zonghoon; Oh, Il-Kwon; Kim, Woo-Hee; Kim, Hyungjun | ARTICLE | 116 |