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Issue DateTitleAuthor(s)TypeView
2020-05Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodesLee, Jae Hwan; Park, Bo-Eun; Thompson, David; Choe, Myeonggi; Lee, Zonghoon; Oh, Il-Kwon; Kim, Woo-Hee; Kim, HyungjunARTICLE116
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