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A bilayer diffusion barrier of ALD-Ru/ALD-TaCN for direct plating of Cu File

Kim, Soo-Hyun , Kim, Hyun Tae , Yim, Sung-Soo , Lee, Do-Joong , Kim, Ki-Su , Kim, Hyun-Mi , Kim, Ki-Bum , Sohn, Hyunchul

Article Issue Date2008-06 View3

A controlled growth of WNx, and WCx thin films prepared by atomic layer deposition File

Kim, Jun Beom , Jang, Byeonghyeon , Lee, Hyun-Jung , Han, Won Seok , Lee, Do-Joong , Lee, Han-Bo-Ram , Hong, Tae Eun , Kim, Soo-Hyun

Article Issue Date2016-04 View0

Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization File

Kim, Jun Beom , Kim, Soo-Hyun , Han, Won Seok , Lee, Do-Joong

Article Issue Date2016-07 View5

Atomic layer deposition of Ti-doped ZnO films with enhanced electron mobility File

Lee, Do-Joong , Kim, Ki-Ju , Kim, Soo-Hyun , Kwon, Jang-Yeon , Xu, Jimmy , Kim, Ki-Bum

Article Issue Date2013-06 View5

Controlling spatial density and size of nanocrystals by two-step atomic layer deposition File

Lee, Do-Joong , Yim, Sung-Soo , Kim, Ki-Su , Kim, Soo-Hyun , Kim, Ki-Bum

Article Issue Date2011-03 View3

Diffusion barriers between Al and Cu for the Cu interconnect of memory devices File

Kim, Soo-Hyun , Yim, Sung-Soo , Lee, Do-Joong , Kim, Ki-Su , Kim, Hyun-Mi , Kim, Ki-Bum , Sohn, Hyunchul

Article Issue Date2008-03 View7

Effect of Al Distribution on Carrier Generation of Atomic Layer Deposited Al-Doped ZnO Films File

Lee, Do-Joong , Kwon, Jang-Yeon , Kim, Soo-Hyun , Kim, Hyun-Mi , Kim, Ki-Bum

Article Issue Date2011-03 View3

Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition File

Park, Ji-Yoon , Yeo, Seungmin , Cheon, Taehoon , Kim, Soo-Hyun , Kim, Min-Kyu , Kim, Hyungjun , Hong, Tae Eun , Lee, Do-Joong

Article Issue Date2014-10 View3

Highly Conformal Amorphous W-Si-N Thin Films by Plasma-Enhanced Atomic Layer Deposition as a Diffusion Barrier for Cu Metallization File

Hong, Tae Eun , Jung, Jae-Hun , Yeo, Seungmin , Cheon, Taehoon , Bae, So Ik , Kim, Soo-Hyun , Yeo, So Jeong , Kim, Hyo-Suk , Chung, Taek-Mo , Park, Bo Keun , et al

Article Issue Date2015-01 View4

Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu File

Jang, Yujin , Kim, Jun Beom , Hong, Tae Eun , Yeo, So Jeong , Lee, Sunju , Jung, Eun Ae , Park, Bo Keun , Chung, Taek-Mo , Kim, Chang Gyoun , Lee, Do-Joong , et al

Article Issue Date2016-04 View8

Highly-conformal p-type copper(I) oxide (Cu2O) thin films by atomic layer deposition using a fluorine-free amino-alkoxide precursor File

Kim, Hangil , Lee, Min Young , Kim, Soo-Hyun , Bae, So Ik , Ko, Kyung Yong , Kim, Hyungjun , Kwon, Kyeong-Woo , Hwang, Jin-Ha , Lee, Do-Joong

Article Issue Date2015-09 View3

Low Temperature Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and O-2 File

Eom, Tae-Kwang , Sari, Windu , Choi, Kyu-Jeong , Shin, Woong-Chul , Kim, Jae Hyun , Lee, Do-Joong , Kim, Ki-Bum , Sohn, Hyunchul , Kim, Soo-Hyun

Article Issue Date2009-08 View3

Nonvolatile memory characteristics of atomic layer deposited Ru nanocrystals with a SiO2/Al2O3 bilayered tunnel barrier File

Lee, Do-Joong , Yim, Sung-Soo , Kim, Ki-Su , Kim, Soo-Hyun , Kim, Ki-Bum

Article Issue Date2010-01 View4

Nucleation kinetics of Ru on silicon oxide and silicon nitride surfaces deposited by atomic layer deposition File

Yim, Sung-Soo , Lee, Do-Joong , Kim, Ki-Su , Kim, Soo-Hyun , Yoon, Tae-Sik , Kim, Ki-Bum

Article Issue Date2008-06 View7

Plasma-free atomic layer deposition of Ru thin films using H-2 molecules as a nonoxidizing reactant File

Lee, Seung-Joon , Kim, Soo-Hyun , Saito, Masayuki , Suzuki, Kazuharu , Nabeya, Shunichi , Lee, Jeongyeop , Kim, Sangdeok , Yeom, Seungjin , Lee, Do-Joong

Article Issue Date2016-05 View1

Resistive switching characteristics of maghemite nanoparticle assembly on Al and Pt electrodes on a flexible substrate File

Yoo, Jae Woo , Hu, Quanli , Baek, Yoon-Jae , Choi, Young Jin , Kang, Chi Jung , Lee, Hyun Ho , Lee, Do-Joong , Kim, Hyun-Mi , Kim, Ki-Bum , Yoon, Tae-Sik

Article Issue Date2012-06 View4

Ruthenium and ruthenium dioxide thin films deposited by atomic layer deposition using a novel zero-valent metalorganic precursor, (ethylbenzene)(1,3-butadiene)Ru(0), and molecular oxygen File

Yeo, Seungmin , Park, Ji-Yoon , Lee, Seung-Joon , Lee, Do-Joong , Seo, Jong Hyun , Kim, Soo-Hyun

Article Issue Date2015-04 View4

Selective Atomic Layer Deposition of Metals on Graphene for Transparent Conducting Electrode Application File

Kim, Minsu , Nabeya, Shunichi , Han, Seung-Min , Kim, Min-Sik , Lee, Sangbong , Kim, Hyun-Mi , Cho, Seong-Yong , Lee, Do-Joong , Kim, Soo-Hyun , Kim, Ki-Bum

Article Issue Date2020-03 View4

Selective Incorporation of Colloidal Nanocrystals in Nanopatterned SiO2 Layer for Nanocrystal Memory Device File

Seo, Il , Lee, Do-Joong , Hu, Quanli , Kwon, Chang-Woo , Lim, Kipil , Lee, Seung-Hyun , Kim, Hyun-Mi , Kim, Yong-Sang , Lee, Hyun Ho , Ryu, Du Yeol , et al

Article Issue Date2010-03 View4

Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films File

Lee, Do-Joong , Kim, Hyun-Mi , Kwon, Jang-Yeon , Choi, Hyoji , Kim, Soo-Hyun , Kim, Ki-Bum

Article Issue Date2011-02 View5

Ultrasmooth, High Electron Mobility Amorphous In-Zn-O Films Grown by Atomic Layer Deposition File

Lee, Do-Joong , Kwon, Jang-Yeon , Kim, Jiyeon , Kim, Ki-Ju , Cho, Yeong-Ho , Cho, Seong-Yong , Kim, Soo-Hyun , Xu, Jimmy , Kim, Ki-Bum

Article Issue Date2014-01 View3

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