Scholarworks@UNIST

UNIST Library
Search

Browsing by Author : Kweon. Minjeong

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
Sort by: In order: Results/Page Etal:

Showing results 1 to 2 of 2

Plasma-enhanced atomic layer deposited highly conductive niobium carbide thin films as next-generation diffusion barriers for Cu and Ru interconnects

Kim, Soo-Hyun , Kim, Sang Bok , Kweon. Minjeong , Park, Chaehyun

Conference Paper Issue Date2024-10-18 View82
YxC thin films prepared by plasma enhanced atomic layer deposition as a diffusion barrier and glue layer for Cu & Ru interconnects

Kweon. Minjeong , Park, Chaehyun , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2024-08-06 View71
1

RSS 1.0 RSS 2.0

CONTACT US

UNIST | Library

Tel : 052-217-1403 / Email : scholarworks@unist.ac.kr

Copyright (c) 2023 by UNIST LIBRARY. All rights reserved.

ScholarWorks@UNIST was established as an OAK Project for the National Library of Korea.