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New integration technology of BST MIM capacitor with Pt spacer for application to 0.15 mu m DRAM and beyond

Kwak, DH , Kwang, YS , Lee, KH , Chun, YS , Park, BJ , Oh, JH , Uh, HS , Jeong, HS , Chung, TY , Kim, KN , et al

Article Issue Date1999-12 View77
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