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Optical Emission Spectroscopy and Gas Kinetics of Picosecond Laser-Induced Chlorine Dissociation for Atomic Layer Etching of Silicon File File

Li, Runxuan , Eliceiri, Matthew H. , Li, Jingang , Korakis, Vasileios , Yang, Rundi , Rho, Yoonsoo , Blankenship, Brian W. , Grigoropoulos, Costas P.

Article Issue Date2025-02 View48
Quantum Sensing in Micro-Architected Scaffolds File

Blankenship, Brian W. , Rho, Yoonsoo , Jones, Zachary R. , Meier, Timon , Li, Runxuan , Druga, Emanuel , Korakis, Vasileios , Singh, Harpreet , Xia, Xiaoxing , Ajoy, Ashok , et al

Article Issue Date2025-12 View25
Scalable phononic metamaterials: Tunable bandgap design and multi-scale experimental validation File File

Meier, Timon , Korakis, Vasileios , Blankenship, Brian W. , Lu, Haotian , Kyriakou, Eudokia , Papamakarios, Savvas , Vangelatos, Zacharias , Yildizdag, M. Erden , Zyla, Gordon , Xia, Xiaoxing , et al

Article Issue Date2025-04 View98
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