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Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential

Jeong, Hyunhak , Kim, Byungjo , Kim, Youjung , Choi, Hanmei , Yoo, Suyoung , Nam, Sang Ki

Conference Paper Issue Date2023-09-27 View81
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