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Group IV Transition Metal (M = Zr, Hf) Precursors for High-kappa Metal Oxide Thin Films File

Lee, Ga Yeon , Yeo, Seungmin , Han, Seong Ho , Park, Bo Keun , Eom, Taeyong , Kim, Jeong Hwan , Kim, Soo-Hyun , Kim, Hyungjun , Son, Seung Uk , Chung, Taek-Mo

Article Issue Date2021-12 View21
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