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Atomic Layer Deposited RuO2 Diffusion Barrier for Next Generation Ru-Interconnects File

Kim, Youn-Hye , Kim, Minsu , Kotsugi, Yohei , Cheon, Taehoon , Mohapatra, Debananda , Jang, Yujin , Bae, Jong-Seong , Hong, Tae Eun , Ramesh, Rahul , An, Ki-Seok , et al

Article Issue Date2022-10 View127
Atomic Layer Deposition of Iridium Using a Tricarbonyl Cyclopropenyl Precursor and Oxygen File

Park, Na-Yeon , Kim, Minsu , Kim, Youn-Hye , Ramesh, Rahul , Nandi, Dip K. , Tsugawa, Tomohiro , Shigetomi, Toshiyuki , Suzuki, Kazuharu , Harada, Ryosuke , Kim, Miso , et al

Article Issue Date2022-02 View189
Atomic Layer Deposition of Ru for Replacing Cu-Interconnects File

Kotsugi, Yohei , Han, Seung-Min , Kim, Youn-Hye , Cheon, Taehoon , Nandi, Dip K. , Ramesh, Rahul , Yu, Neung-Kyung , Son, Kirak , Tsugawa, Tomohiro , Ohtake, Shigeyuki , et al

Article Issue Date2021-07 View174
Atomic Layer Modulation of Ruthenium Aluminum Oxide through Reactivity Control of Precursors for Seedless Copper Interconnects File

Nguyen, Chi Thang , Kim, Miso , Kim, Youn-Hye , Cheon, Taehoon , Trinh, Ngoc Le , Kim, Sehee , Kim, Soo-Hyun , Shong, Bonggeun , Lee, Han-Bo-Ram

Article Issue Date2025-12 View28
Atomically dispersed iridium catalysts on silicon photoanode for efficient photoelectrochemical water splitting File File

Jun, Sang Eon , Kim, Youn-Hye , Kim, Jaehyun , Cheon, Woo Seok , Choi, Sungkyun , Yang, Jinwook , Park, Hoonkee , Lee, Hyungsoo , Park, Sun Hwa , Kwon, Ki Chang , et al

Article Issue Date2023-02 View229
Interfacial adhesion energies of Ru-Mn direct plateable diffusion barriers prepared by atomic layer deposition for advanced Cu interconnects File

Son, Kirak , Kim, Youn-Hye , Kim, Soo-Hyun , Park, Young-Bae

Article Issue Date2021-08 View74
Process Controlled Ruthenium on 2D Engineered V-MXene via Atomic Layer Deposition for Human Healthcare Monitoring File File

Mohapatra, Debananda , Shin, Yujin , Ansari, Mohd Zahid , Kim, Youn-Hye , Park, Ye Jin , Cheon, Taehoon , Kim, Haekyoung , Lee, Jung Woo , Kim, Soo-Hyun

Article Issue Date2023-04 View124
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