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Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant File

Jung, Jae-Hun , Lee, Seung-Joon , Lee, Hyun-Jung , Lee, Min Young , Cheon, Taehoon , Bae, So Ik , Saito, Masayuki , Suzuki, Kazuharu , Nabeya, Shunichi , Lee, Jeongyeop , et al

Article Issue Date2015-11 View121
Plasma-free atomic layer deposition of Ru thin films using H-2 molecules as a nonoxidizing reactant File

Lee, Seung-Joon , Kim, Soo-Hyun , Saito, Masayuki , Suzuki, Kazuharu , Nabeya, Shunichi , Lee, Jeongyeop , Kim, Sangdeok , Yeom, Seungjin , Lee, Do-Joong

Article Issue Date2016-05 View110
Pseudo-trilayer Organoclay Enables Directed Li+ Transport and Anion Trapping in Quasi-Solid-State Gel Electrolytes File

Choi, Young Gyun , Kim, Jongkyoung , Park, Chanui , Jang, Jin Il , Kim, Sangdeok , Kim, Hyoseok , Kim, Hyung Min , Lee, Won Bo , Cho, Seungho , Park, Jong Hyeok

Article Issue Date2025-09 View40
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