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Full integration of highly reliable phase change memory with advanced ring type bottom electrode contact File

Shin, J. M. , Song, Y. J. , Kang, D. W. , Jeong, Changwook , Ryoo, K. C. , Park, J. H. , Oh, J. H. , Kong, J. H. , Jae , Park , et al

Article Issue Date2007-05 View16
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