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Computational approach for plasma process optimization combined with deep learning model File

Ko, Jungmin , Bae, Jinkyu , Park, Minho , Jo, Younghyun , Lee, Hyunjae , Kim, Kyunghyun , Yoo, Suyoung , Nam, Sang Ki , Sung, Dougyong , Kim, Byungjo

Article Issue Date2023-08 View56
Plasma chamber design method combined with plasma deep learning model and optimization algorithm

Ko, JungMin , Bae, Jinkyu , Kim, Byungjo , Lee, Hyunjae , Jo, Younghyun , Nam, Sangki

Conference Paper Issue Date2022-10-06 View37
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