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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)TypeView
2001-04Residual stress behavior in methylsilsesquioxane-based dielectric thin filmsOh, W; Shin, Tae Joo; Ree, M; Jin, MY; Char, KARTICLE537
2002-03Residual stress evolution in dielectric thin films prepared from poly(methylsilsesquioxane) precursorOh, W; Shin, TJ; Ree, M; Jin, MY; Char, KARTICLE57
Showing results 1 to 2 of 2

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