Showing results 1 to 2 of 2
Issue Date | Title | Author(s) | Type | View |
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2001-04 | Residual stress behavior in methylsilsesquioxane-based dielectric thin films | Oh, W; Shin, Tae Joo; Ree, M; Jin, MY; Char, K | ARTICLE | 713 |
2002-03 | Residual stress evolution in dielectric thin films prepared from poly(methylsilsesquioxane) precursor | Oh, W; Shin, TJ; Ree, M; Jin, MY; Char, K | ARTICLE | 182 |