Scholarworks@UNIST

UNIST Library
Search

Browsing by Author : Jang, Byeonghyeon

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
Sort by: In order: Results/Page Etal:

Showing results 1 to 5 of 5

A controlled growth of WNx, and WCx thin films prepared by atomic layer deposition File

Kim, Jun Beom , Jang, Byeonghyeon , Lee, Hyun-Jung , Han, Won Seok , Lee, Do-Joong , Lee, Han-Bo-Ram , Hong, Tae Eun , Kim, Soo-Hyun

Article Issue Date2016-04 View41
Application of Pulsed Chemical Vapor Deposited Tungsten Thin Film as a Nucleation Layer for Ultrahigh Aspect Ratio Tungsten-Plug Fill Process File

Jang, Byeonghyeon , Kim, Soo-Hyun

Article Issue Date2016-08 View27
Atomic Layer Deposition of Al2O3 Thin Films Using Dimethyl Aluminum sec-Butoxide and H2O Molecules File

Jang, Byeonghyeon , Kim, Soo-Hyun

Article Issue Date2016-07 View25
Fabrication of single-phase SnS film by H-2 annealing of amorphous SnSx prepared by atomic layer deposition File

Jang, Byeonghyeon , Yeo, Seungmin , Kim, Hyungjun , Shin, Byungha , Kim, Soo-Hyun

Article Issue Date2017-05 View41
Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films File

Choi, Taejin , Yeo, Seungmin , Song, Jeong-Gyu , Seo, Seunggi , Jang, Byeonghyeon , Kim, Soo-Hyun , Kim, Hyungjun

Article Issue Date2018-06 View51
1

RSS 1.0 RSS 2.0

CONTACT US

UNIST | Library

Tel : 052-217-1404 / Email : scholarworks@unist.ac.kr

Copyright (c) 2023 by UNIST LIBRARY. All rights reserved.

ScholarWorks@UNIST was established as an OAK Project for the National Library of Korea.