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Showing results 1 to 2 of 2
Optimization of PECVD-Deposited SiOxNy Films: Investigating Compositional Dependency of Functional Properties
File
Jang, Woo Cheol
Thesis
Issue Date
2025-08
View
70
Research on Silicon Oxynitride Thin Films Deposited by PECVD Processes with Low-GWP Gas
Shin, Tae Joo
,
Jang, Woo Cheol
Conference Paper
Issue Date
2024-11-20
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44
1
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