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High-Performance Oxide Thin-Film Transistors with Atomic Layer Deposition-Grown HfO2/BeO Hetero-Dielectric File

Lee, Sein , Jang, Yoonseo , Ham, Wooho , Bae, Jonghyun , Kim, Kyunghwan , Park, Jeong-Min , Lee, Junseo , Song, Min-Kyu , Jung, Dohwan , Sultane, Prakash R. , et al

Article Issue Date2025-04 View31
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