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Atomistic-scale Simulations on Surface Activation Process of Dielectric Oxides for Hybrid Bonding Applications

Hahn, Seung Ho , Lee, Hyunjae , Jo, Young Hyun , Kim, Byungjo , Kim, Wooyoung , Choi, Wonyoung , Lim, Kyeongbin , Rhee, Minwoo

Conference Paper Issue Date2021-12-01 View17
Deep neural network-based reduced-order modeling of ion-surface interactions combined with molecular dynamics simulation File

Kim, Byungjo , Bae, Jinkyu , Jeong, Hyunhak , Hahn, Seung Ho , Yoo, Suyoung , Nam, Sang Ki

Article Issue Date2023-09 View38
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