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Atomic Layer Deposition of Dielectrics on Graphene Using Reversibly Physisorbed Ozone File

Jandhyala, Srikar , Mordi, Greg , Lee, Bongki , Lee, Geunsik , Floresca, Carlo , Cha, Pil-Ryung , Ahn, Jinho , Wallace, Robert M. , Chabal, Yves J. , Kim, Moon J. , et al

Article Issue Date2012-02 View33
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