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Optical Emission Spectroscopy and Gas Kinetics of Picosecond Laser-Induced Chlorine Dissociation for Atomic Layer Etching of Silicon File File

Li, Runxuan , Eliceiri, Matthew H. , Li, Jingang , Korakis, Vasileios , Yang, Rundi , Rho, Yoonsoo , Blankenship, Brian W. , Grigoropoulos, Costas P.

Article Issue Date2025-02 View48
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