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Atomic Layer Deposition of Epitaxial Ferroelectric Hf0.5Zr0.5O2 Thin Films File

Cho, Jung Woo , Song, Myeong Seop , Choi, In Hyeok , Go, Kyoung-June , Han, Jaewoo , Lee, Tae Yoon , An, Chihwan , Choi, Hyung-Jin , Sohn, Chang Hee , Park, Min Hyuk , et al

Article Issue Date2024-06 View191
Deterministic Orientation Control ofFerroelectric HfO2 Thin Film Growth by aTopotactic Phase Transition of an OxideElectrode File

Lee, Kyoungjun , Park, Kunwoo , Choi, In Hyeok , Cho, Jung Woo , Song, Myeong Seop , Kim, Chang Hoon , Lee, Jun Hee , Lee, Jong Seok , Park, Jungwon , Chae, Seung Chul

Article Issue Date2024-05 View108
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