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Effect of the Bilayer Period of Atomic Layer Deposition on the Growth Behavior and Electrical Properties of the Amorphous In-Zn-O Film File

Lee, Sangbong , Kang, Yun-Ho , Kim, Min-Sik , Lee, Hyerin , Cho, Yeong-Ho , Kim, Minsu , Yoon, Tae-Sik , Kim, Hyun-Mi , Kim, Ki-Bum

Article Issue Date2020-09 View35
Ultrasmooth, High Electron Mobility Amorphous In-Zn-O Films Grown by Atomic Layer Deposition File

Lee, Do-Joong , Kwon, Jang-Yeon , Kim, Jiyeon , Kim, Ki-Ju , Cho, Yeong-Ho , Cho, Seong-Yong , Kim, Soo-Hyun , Xu, Jimmy , Kim, Ki-Bum

Article Issue Date2014-01 View15
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