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Growth and Characterization of BeO Thin Films Grown by Atomic Layer Deposition Using H2O and O3 as Oxygen Sources File

Lee, Woo Chul , Cho, Cheol Jin , Kim, Sangtae , Larsen, Eric S. , Yum, Jung Hwan , Bielawski, Christopher W. , Hwang, Cheol Seong , Kim, Seong Keun

Article Issue Date2017-08 View81
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