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Computational approach for plasma process optimization combined with deep learning model File

Ko, Jungmin , Bae, Jinkyu , Park, Minho , Jo, Younghyun , Lee, Hyunjae , Kim, Kyunghyun , Yoo, Suyoung , Nam, Sang Ki , Sung, Dougyong , Kim, Byungjo

Article Issue Date2023-08 View47
Deep learning model for ion sputtering dynamics with molecular dynamics simulation

Kim, Byungjo , Bae, Jinkyu , Jeong, Hyunhak , Yoo, Suyoung , Nam, Sang Ki

Conference Paper Issue Date2022-10-05 View26
Deep neural network-based reduced-order modeling of ion-surface interactions combined with molecular dynamics simulation File

Kim, Byungjo , Bae, Jinkyu , Jeong, Hyunhak , Hahn, Seung Ho , Yoo, Suyoung , Nam, Sang Ki

Article Issue Date2023-09 View41
Plasma chamber design method combined with plasma deep learning model and optimization algorithm

Ko, JungMin , Bae, Jinkyu , Kim, Byungjo , Lee, Hyunjae , Jo, Younghyun , Nam, Sangki

Conference Paper Issue Date2022-10-06 View34
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