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Atomic Layer Deposition of Epitaxial Ferroelectric Hf0.5Zr0.5O2 Thin Films File

Cho, Jung Woo , Song, Myeong Seop , Choi, In Hyeok , Go, Kyoung-June , Han, Jaewoo , Lee, Tae Yoon , An, Chihwan , Choi, Hyung-Jin , Sohn, Chang Hee , Park, Min Hyuk , et al

Article Issue Date2024-06 View191
Geometrical Anatomy for Oxygen Vacancies in Epitaxial Hf0.5Zr0.5O2 Films Grown via Atomic Layer Deposition File

An, Chihwan , Cho, Jung Woo , Lee, Tae Yoon , Song, Myeong Seop , Kang, Baekjune , Kim, Hongju , Lee, Jun Hee , Sohn, Chang Hee , Chae, Seung Chul

Article Issue Date2025-04 View170
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