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Optimization of Ring Type Electrode Process for High Density PRAM File

Ryoo, K. C. , Song, Y. J. , Kang, D. H. , Jeong, Changwook , Kong, J. H. , Oh, J. H. , Lim, D. W. , Park, S. S. , .Kim, J. I , Kim, J. H. , et al

Conference Paper Issue Date2006-09-12 View19
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