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Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications File

Yeo, Seungmin , Nandi, Dip K. , Rahul, R. , Kim, Tae Hyun , Shong, Bonggeun , Jang, Yujin , Bae, Jong-Seong , Han, Jeong Woo , Kim, Soo-Hyun , Kim, Hyungjun

Article Issue Date2018-11 View22
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