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Fluorine-free Plasma Enhanced Atomic Layer Deposited Ultrathin Tungsten Nitride Thin Films for Dual Diffusion Barrier Performance File

Seo, Kang-Min , Mohapatra, Debananda , Bae, Gun-Woo , Ansari, Mohd Zahid , Son, Yeseul , Jang, Yujin , Bae, Jong-Seong , Hong, Tae Eun , Kim, Soo-Hyun

Article Issue Date2023-12 View37
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