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Showing results 29 to 34 of 34

TEM Analyses of Plasma Enhanced Atomic Layer Deposition

Lee, Zonghoon , Kim, Kangsik

Conference Paper Issue Date2015-10-28 View4
TEM Analysis of Plasma Induced Damages in Plasma Enhanced Atomic Layer Deposition

Kim, Kangsik , Oh, Il Kwon , Kim, Hyungjun , Lee, Zonghoon

Conference Paper Issue Date2016-09-23 View14
Tensile and Fracture Behavior of Monolithic Ultra-thin Amorphous Carbon by In Situ TEM Nanomechanical Testing

Yoon, Jongchan , Jang, Younggeun , Kim, Kangsik , Kim, Jaemin , Son, Seungwoo , Lee, Zonghoon

Conference Paper Issue Date2023-09-12 View4
Understanding Interface-Controlled Resistance Drift in Superlattice Phase Change Memory File

Wu, Xiangjin , Khan, Asir Intisar , Ramesh, Pranav , Perez, Christopher , Kim, Kangsik , Lee, Zonghoon , Saraswat, Krishna , Goodson, Kenneth E. , Wong, H-S Philip , Pop, Eric

Article Issue Date2022-10 View8
Unveiling the Effect of Superlattice Interfaces and Intermixing on Phase Change Memory Performance File

Khan, Asir Intisar , Wu, Xiangjin , Perez, Christopher , Won, Byoungjun , Kim, Kangsik , Ramesh, Pranav , Kwon, Heungdong , Tung, Maryann C. , Lee, Zonghoon , Oh, Il-Kwon , et al

Article Issue Date2022-07 View4
Very high frequency plasma reactant for atomic layer deposition File

Oh, Il-Kwon , Yoo, Gilsang , Yoon, Chang Mo , Kim, Tae Hyung , Yeom, Geun Young , Kim, Kangsik , Lee, Zonghoon , Jung, Hanearl , Lee, Chang Wan , Kim, Hyungjun , et al

Article Issue Date2016-11 View4
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