File Download
There are no files associated with this item.
SFX Link
- Find it @ UNIST can give you direct access to the published full text of this article. (UNISTARs only)
- Shin, Hyung-Joon
- Nanoscale Materials Science Lab.
Views & Downloads
Detailed Information
Cited time in 
Cited time in 
Cited time in
Metadata Downloads
Patterning of ferroelectric nanodot arrays using a silicon nitride shadow mask
- Issued Date
- 2005-09
- DOI
- 10.1063/1.208818
- Citation
- APPLIED PHYSICS LETTERS, v.87, no.11, pp.113114-1 - 113114-3
- Abstract
- We grew well-ordered arrays of ferroelectric Pb (Zr0.2 Ti0.8) O3 (PZT) nanodots on a SrRu O3 SrTi O3 substrate by pulsed laser deposition. A silicon nitride shadow mask with ordered holes was used for patterning of the PZT arrays. Each dot has a height of ∼15 nm and a diameter of ∼120 nm with a similar dome shape over a large area. The ferroelectric properties of individual PZT dots were investigated by piezoresponse force microscopy. A single dot could be polarized individually and the polarized state remained unrelaxed to ∼20 min.
- Publisher
- AMER INST PHYSICS
- ISSN
- 0003-6951
- Keyword
- CAPACITORS, IMPRINT, SIZE
Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.