BROWSE

Related Researcher

Author

Kim, Ju-Young
Robust Multifunctional Materials Lab
Research Interests
  • Flexible / stretchable devices, nano-mechanics, nanoporous metal, materials reliability

ITEM VIEW & DOWNLOAD

Yield property characterization for Au and TiN thin films by applying nanoindentation technique

Cited 3 times inthomson ciCited 5 times inthomson ci
Title
Yield property characterization for Au and TiN thin films by applying nanoindentation technique
Author
Lee, Yun-HeeHuh, Yong-HakKim, Ju-YoungNahm, Seung-HoonJang, Jae-ilKwon, Dongil
Keywords
3D indent visualization; Nanoindentation; Thin film; Yield strength
Issue Date
2006
Publisher
Trans Tech Publications Ltd.
Citation
KEY ENGINEERING MATERIALS, v.326-328, no., pp.215 - 218
Abstract
We tried to apply the nanoindentation technique to yield strength characterization by modifying a previous research. Although the yield strength determining technique developed by Kramer et al. has been successfully demonstrated for large scale indentations on bulky metals, its applicability is still doubtful to nanoscale indentations on thin films with severe roughness, anisotropy, and interfacial constraint. In order to overcome these problems, we combined the nanoindentation technique with a three-dimensional indent visualization technique in this study. Nanoindentation tests were performed for Au and TiN thin films and their corresponding indents were scanned by using an atomic force microscope. From the three-dimensional pile-up morphology, a circular pile-up boundary was measured and input into the yield strength formulation as an effective yielded zone radius. The yield strengths calculated were directly compared with those from the microtensile test.
URI
Go to Link
DOI
http://dx.doi.org/10.4028/www.scientific.net/KEM.326-328.215
ISSN
1013-9826
Appears in Collections:
MSE_Journal Papers
Files in This Item:
There are no files associated with this item.

find_unist can give you direct access to the published full text of this article. (UNISTARs only)

Show full item record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

MENU