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- Shin, Heungjoo
- Micro/Nano Integrated Systems Lab.
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식각공정 없이 제작된 공중부유형 메쉬형 히터 기반 열전도도 검출기형 가스센서
- Alternative Title
- Suspended mesh heater-based thermal conductivity detector (TCD)-type gas sensor fabricated without an etching process
- Author(s)
- Cho, Wootaek, Kwak, Jong-Hyun, Shin, Heungjoo
- Issued Date
- 2023-03-22
- Citation
- 제25회 한국 MEMS 학술대회
- Publisher
- 마이크로나노시스템학회
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