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Suh, Joonki
Semiconductor Nanotechnology Lab.
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dc.citation.endPage 555 -
dc.citation.number 6 -
dc.citation.startPage 547 -
dc.citation.title 전기전자재료학회논문지 -
dc.citation.volume 36 -
dc.contributor.author 김승환 -
dc.contributor.author 김창환 -
dc.contributor.author 허남욱 -
dc.contributor.author Suh, Joonki -
dc.date.accessioned 2023-12-14T17:11:04Z -
dc.date.available 2023-12-14T17:11:04Z -
dc.date.created 2023-10-30 -
dc.date.issued 2023-11 -
dc.description.abstract High-density crossbar arrays based on storage class memory (SCM) are ideally suited to handle an exponential increase in data storage and processing as a central hardware unit in the era of AI-based technologies. To achieve this, selector devices are required to be co-integrated with SCM to address the sneak-path current issue that indispensably arises in such crossbar-type architecture. In this perspective, we first summarize the current state of tellurium-based threshold-switching devices and recent advances in the material, processing, and device aspects. We thoroughly review the physicochemical properties of elemental tellurium (Te) and representative binary tellurides, their tailored deposition techniques, and operating mechanisms when implemented in two-terminal threshold switching devices. Lastly, we discuss the promising research direction of Te-based selectors and possible issues that need to be considered in advance. -
dc.identifier.bibliographicCitation 전기전자재료학회논문지, v.36, no.6, pp.547 - 555 -
dc.identifier.doi 10.4313/JKEM.2023.36.6.2 -
dc.identifier.issn 1226-7945 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/66074 -
dc.language 한국어 -
dc.publisher 한국전기전자재료학회 -
dc.title.alternative Advanced Tellurium-Based Threshold Switching Devices for High-Density Memory Arrays -
dc.title Tellurium 기반 휘발성 문턱 스위칭 및 고집적 메모리용 선택소자 응용 연구 -
dc.type Article -
dc.description.isOpenAccess TRUE -
dc.identifier.kciid ART003009037 -
dc.description.journalRegisteredClass kci -
dc.subject.keywordAuthor Selector -
dc.subject.keywordAuthor Tellurium -
dc.subject.keywordAuthor Storage class memory -
dc.subject.keywordAuthor Ovonic threshold switch -
dc.subject.keywordAuthor Sneak current path -
dc.subject.keywordAuthor Sputtering -
dc.subject.keywordAuthor Atomic layer deposition -

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