Fabrication of highly ordered silicon oxide dots and stripes from block copolymer thin films
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- Fabrication of highly ordered silicon oxide dots and stripes from block copolymer thin films
- Park, Soojin; Kim, Bokyung; Wang, Jia-Yu; Russell, Thomas P.
- TEMPLATES; ARRAYS; NANOSTRUCTURES; LITHOGRAPHY; POLYSTYRENE; ORIENTATION; TEMPERATURE; PATTERNS; GROWTH
- Issue Date
- WILEY-V C H VERLAG GMBH
- ADVANCED MATERIALS, v.20, no.4, pp.681 - 685
- A general route to fabricate highly ordered arrays of nanoscopic silicon oxide dots and stripes (see figure) from block copolymer thin films is described. Poly (styrene-b-4-vinylpyridine) thin films with cylindrical microdomains oriented normal and parallel to the surface were used as templates for the fabrication of nanoscopic silicon oxide, with polydimethylsiloxane as the inorganic precursor.
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