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Park, Soojin
Nano-Functional Materials Lab
Research Interests
  • Block Copolymers, nanostructured materials for Lithium-Ion batteries, wearable and stretchable energy storage applications

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From nanorings to nanodots by patterning with block copolymers

Cited 77 times inthomson ciCited 73 times inthomson ci
Title
From nanorings to nanodots by patterning with block copolymers
Author
Park, SoojinWang, Jia-YuKim, BokyungRussell, Thomas P.
Keywords
Block copolymer films; Diblock copolymers; Glancing angles; High fidelities; Metal evaporations; Micro-domains; Nanodots; Pattern transfers; Thermal-annealing; Transfer patterns
Issue Date
200806
Publisher
AMER CHEMICAL SOC
Citation
NANO LETTERS, v.8, no.6, pp.1667 - 1672
Abstract
We demonstrate three different transfer patterns that can be achieved by use of a surface reconstructed block copolymer film where metal is evaporated onto the surface of the film, providing the contrast. Thin films of diblock copolymers having cylindrical microdomains oriented normal to the surface with long-range lateral order were used. Solvent reconstruction of the film, followed by a glancing angle metal evaporation and thermal annealing, led to three different decorations of the films with gold. These films were used as masks for pattern transfer of pores, columns, and rings to underlying substrate with high fidelity.
URI
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DOI
http://dx.doi.org/10.1021/nl0805110
ISSN
1530-6984
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