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- Jeong, Changwook
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플라즈마 도움 원자층 제어 증착법을 이용한 Al2O3 의 성장과 박막 특성의 연구
- Alternative Title
- Growth and Characterization of Aluminum Oxide (Al~ 2O~ 3) Thin Films by Plasma-Assisted Atomic Layer Controlled Deposition
- Issued Date
- 2000-10
- Citation
- 대한금속·재료학회지, v.38, no.10, pp.1395 - 1399
- Publisher
- 대한금속·재료학회
- ISSN
- 1738-8228
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