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Madou, Mark
BIO-MEMS Lab
Research Interests
  • Medical Diagnostics

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From MEMS to NEMS with carbon

Cited 51 times inthomson ciCited 50 times inthomson ci
Title
From MEMS to NEMS with carbon
Author
Wang, CLMadou, Mark
Keywords
Carbon-microelectromechanical system (C-MEMS); High-aspect ratio; Photoresist; Pyrolysis; Suspended structure
Issue Date
200504
Publisher
ELSEVIER ADVANCED TECHNOLOGY
Citation
BIOSENSORS & BIOELECTRONICS, v.20, no.10, pp.2181 - 2187
Abstract
Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication approach to battery miniaturization, active DNA arrays and a wide variety of chemical and biological sensors. In C-MEMS, photoresist is patterned by photolithography and subsequently pyrolyzed at high-temperatures in an oxygen-free environment. We established that it is possible to use C-MEMS to create very high-aspect ratio carbon structures (e.g. posts with an aspect ratio >10), suspended carbon plates and suspended carbon nanowires (C-NEMS). By changing the lithography conditions, soft and hard baking times and temperatures, additives to the resist, pyrolysis time, temperature and environment, C-MEMS permits a wide variety of interesting new MEMS and NEMS applications that employ structures having a wide variety of shapes, resistivities and mechanical properties. We also demonstrate that arrays of high-aspect ratio carbon posts can be charged/discharged with Li and this enables the fabrication of a smart switchable array of batteries.
URI
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DOI
http://dx.doi.org/10.1016/j.bios.2004.09.034
ISSN
0956-5663
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