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DC Field | Value | Language |
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dc.citation.endPage | 3077 | - |
dc.citation.number | 14 | - |
dc.citation.startPage | 3073 | - |
dc.citation.title | CARBON | - |
dc.citation.volume | 44 | - |
dc.contributor.author | Wang, Chunlei | - |
dc.contributor.author | Zaouk, Rabih | - |
dc.contributor.author | Madou, Mark | - |
dc.date.accessioned | 2023-12-22T09:40:53Z | - |
dc.date.available | 2023-12-22T09:40:53Z | - |
dc.date.created | 2014-08-29 | - |
dc.date.issued | 2006-11 | - |
dc.description.abstract | The addition of nanofeatures to carbon microelectromechanical system (C-MEMS) structures would greatly increase surface area and enhance their performance in miniature batteries, super-capacitors, electrochemical and biological sensors. Negative photoresist posts were patterned on a Au/Ti contact layer by photolithography. After pyrolyzing the photoresist patterns to carbon patterns, graphitic nanofibers were observed near the contact layer. The incorporation of carbon nanofibers in C-MEMS structures via a simple pyrolysis of modified photoresist was investigated. Both experimental results considered to consist of a local chemical vapor deposition mechanism. The method represents a novel, elegant and inexpensive way to equip carbon microfeatures with nanostructures, in a process that could possibly be scaled up to the mass production of many electronic and biological devices. | - |
dc.identifier.bibliographicCitation | CARBON, v.44, no.14, pp.3073 - 3077 | - |
dc.identifier.doi | 10.1016/j.carbon.2006.05.007 | - |
dc.identifier.issn | 0008-6223 | - |
dc.identifier.scopusid | 2-s2.0-33748774703 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/5747 | - |
dc.identifier.url | http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=33748774703 | - |
dc.identifier.wosid | 000241447500027 | - |
dc.language | 영어 | - |
dc.publisher | PERGAMON-ELSEVIER SCIENCE LTD | - |
dc.title | Local chemical vapor deposition of carbon nanofibers from photoresist | - |
dc.type | Article | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordAuthor | carbon nanofibers | - |
dc.subject.keywordAuthor | pyrolysis | - |
dc.subject.keywordAuthor | chemical vapor deposition | - |
dc.subject.keywordAuthor | electron microscopy | - |
dc.subject.keywordAuthor | microstructure | - |
dc.subject.keywordPlus | NANOTUBES | - |
dc.subject.keywordPlus | STORAGE | - |
dc.subject.keywordPlus | POLYMER | - |
dc.subject.keywordPlus | MEMS | - |
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