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Madou, Mark
BIO-MEMS Lab
Research Interests
  • Medical Diagnostics

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Local chemical vapor deposition of carbon nanofibers from photoresist

Cited 10 times inthomson ciCited 12 times inthomson ci
Title
Local chemical vapor deposition of carbon nanofibers from photoresist
Author
Wang, ChunleiZaouk, RabihMadou, Mark
Keywords
Carbon nanofibers; Chemical vapor deposition; Electron microscopy; Microstructure; Pyrolysis
Issue Date
200611
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Citation
CARBON, v.44, no.14, pp.3073 - 3077
Abstract
The addition of nanofeatures to carbon microelectromechanical system (C-MEMS) structures would greatly increase surface area and enhance their performance in miniature batteries, super-capacitors, electrochemical and biological sensors. Negative photoresist posts were patterned on a Au/Ti contact layer by photolithography. After pyrolyzing the photoresist patterns to carbon patterns, graphitic nanofibers were observed near the contact layer. The incorporation of carbon nanofibers in C-MEMS structures via a simple pyrolysis of modified photoresist was investigated. Both experimental results considered to consist of a local chemical vapor deposition mechanism. The method represents a novel, elegant and inexpensive way to equip carbon microfeatures with nanostructures, in a process that could possibly be scaled up to the mass production of many electronic and biological devices.
URI
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DOI
http://dx.doi.org/10.1016/j.carbon.2006.05.007
ISSN
0008-6223
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