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Madou, Mark
BIO-MEMS Lab
Research Interests
  • Medical Diagnostics

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Fabrication of suspended carbon microstructures by e-beam writer and pyrolysis

Cited 20 times inthomson ciCited 18 times inthomson ci
Title
Fabrication of suspended carbon microstructures by e-beam writer and pyrolysis
Author
Malladi, KartikeyaWang, ChunleiMadou, Mark
Keywords
Microstructure; Plasma sputtering; Pyrolysis; Pyrolytic carbon; Scanning electron microscope
Issue Date
200611
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Citation
CARBON, v.44, no.13, pp.2602 - 2607
Abstract
A fabrication process has been developed to create suspended carbon microelectromechanical system (C-MEMS) structures. SU-8, a negative photoresist, was used as the starting material and was converted to the desired carbon microstructures using pyrolysis in an inert atmosphere. Suspended carbon-micro and nano electromechanical system (C-MEMS/NEMS) structures with feature sizes down to 500 nm were fabricated by ultra violet/electron beam (EB) lithography and pyrolysis. The problem of charging of the non-conductive SU-8 surface was solved by partially masking a thin metal layer to prevent the repulsion of negative charged electrons before EB writing. Complex suspended C-MEMS structures, such as bridges and networks have been formed. This fabrication method can accurately and reproducibly produce various suspended C-MEMS structures which have applications in microelectronics and biosensing
URI
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DOI
http://dx.doi.org/10.1016/j.carbon.2006.04.039
ISSN
0008-6223
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