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Madou, Mark
BIO-MEMS Lab
Research Interests
  • Medical Diagnostics

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Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media

Cited 49 times inthomson ciCited 67 times inthomson ci
Title
Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media
Author
Park, BYTaherabadi, LWang, CLZoval, JMadou, Mark
Keywords
CHEMICAL-VAPOR-DEPOSITION; LOW-TEMPERATURE REGIME; ELECTROCHEMICAL APPLICATIONS; PYROCARBON DEPOSITION; PYROLYTIC CARBON; C-MEMS; FABRICATION; CHEMISTRY; KINETICS; BENZENE
Issue Date
2005
Publisher
ELECTROCHEMICAL SOC INC
Citation
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.152, no.12, pp.J136 - J143
Abstract
Recent advances in fabricating 3D micro- and nanostructures using carbon microelectromechanical systems, or C-MEMS, has opened up a wide variety of new and exciting applications. The development of 3D C-MEMS has been catapulted forward by the use of transparent, high-viscosity resists such as SU-8. The electrical characteristics and shrinkage of various thickness carbon films derived from SU-8 and AZ P4620 are quantified and discussed in the context of the decomposition and carbonization mechanisms of epoxy and phenolic resins. Measurements obtained reveal a thickness dependence of the resistivity at lower carbonization temperatures but not much dependence at 1000 degrees C. Possible explanations for this low-temperature thickness dependence are given. The electrical characteristics of carbon films obtained from both types of photoresists carbonized at 1000 degrees C are very similar to that of glassy carbon. Simulations have been carried out to demonstrate the importance of the carbon resistivity for C-MEMS devices when used in conductive media. A method for simple optimization and verification of C-MEMS device designs for use in conductive media is introduced.
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DOI
http://dx.doi.org/10.1149/1.2116707
ISSN
0013-4651
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