Highly Elastic and Corrosion-Resistive Metallic Glass Thin Films for Flexible Encapsulation

Abstract

Ternary CuZrTi metallic glass thin films synthesized by sputtering are suggested as highly flexible and corrosion-resistant encapsulation materials. Unlike nanocrystalline Cu and binary CuZr metallic glass thin films, the ternary CuZrTi metallic glass thin films retain amorphous structure and do not oxidize even after 1000 h in an accelerated harsh environment at 85 degrees C with 85% relative humidity. The encapsulation performance of 260 nm thick ternary CuZrTi metallic glass is maintained even after 1000 bending cycles at a 3% tensile strain, corresponding to 70% of the elastic deformation limit, according to the results of a uniaxial tensile test. Because of the enhanced mechanical flexibility and reliability of the ternary CuZrTi metallic glass thin films, they have been applied to flexible organic solar cells as an encapsulation material.