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dc.citation.number 10 -
dc.citation.startPage 1246 -
dc.citation.title MICROMACHINES -
dc.citation.volume 12 -
dc.contributor.author Lee, Siyoung -
dc.contributor.author Lee, Eun Kwang -
dc.contributor.author Lee, Eunho -
dc.contributor.author Bae, Geun Yeol -
dc.date.accessioned 2023-12-21T15:09:50Z -
dc.date.available 2023-12-21T15:09:50Z -
dc.date.created 2021-12-09 -
dc.date.issued 2021-10 -
dc.description.abstract With the advent of human-machine interaction and the Internet of Things, wearable and flexible vibration sensors have been developed to detect human voices and surrounding vibrations transmitted to humans. However, previous wearable vibration sensors have limitations in the sensing performance, such as frequency response, linearity of sensitivity, and esthetics. In this study, a transparent and flexible vibration sensor was developed by incorporating organic/inorganic hybrid materials into ultrathin membranes. The sensor exhibited a linear and high sensitivity (20 mV/g) and a flat frequency response (80-3000 Hz), which are attributed to the wheel-shaped capacitive diaphragm structure fabricated by exploiting the high processability and low stiffness of the organic material SU-8 and the high conductivity of the inorganic material ITO. The sensor also has sufficient esthetics as a wearable device because of the high transparency of SU-8 and ITO. In addition, the temperature of the post-annealing process after ITO sputtering was optimized for the high transparency and conductivity. The fabricated sensor showed significant potential for use in transparent healthcare devices to monitor the vibrations transmitted from hand-held vibration tools and in a skin-attachable vocal sensor. -
dc.identifier.bibliographicCitation MICROMACHINES, v.12, no.10, pp.1246 -
dc.identifier.doi 10.3390/mi12101246 -
dc.identifier.issn 2072-666X -
dc.identifier.scopusid 2-s2.0-85118113679 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/55352 -
dc.identifier.url https://www.mdpi.com/2072-666X/12/10/1246 -
dc.identifier.wosid 000714046800001 -
dc.language 영어 -
dc.publisher MDPI -
dc.title Transparent and Flexible Vibration Sensor Based on a Wheel-Shaped Hybrid Thin Membrane -
dc.type Article -
dc.description.isOpenAccess TRUE -
dc.relation.journalWebOfScienceCategory Chemistry, Analytical; Nanoscience & Nanotechnology; Instruments & Instrumentation; Physics, Applied -
dc.relation.journalResearchArea Chemistry; Science & Technology - Other Topics; Instruments & Instrumentation; Physics -
dc.type.docType Article -
dc.description.journalRegisteredClass scie -
dc.description.journalRegisteredClass scopus -
dc.subject.keywordAuthor organic/inorganic hybrid -
dc.subject.keywordAuthor flexible sensor -
dc.subject.keywordAuthor vibration sensor -
dc.subject.keywordAuthor transparency -
dc.subject.keywordPlus FILM -

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