Interchangeable Stage and Probe Mechanisms for Microscale Universal Mechanical Tester

Abstract

A microfabricated mechanical test platform has been designed, fabricated, and operated. This system consists of a reusable chip capable of large-displacement actuation, which interfaces to a test coupon chip compatible with synthesis conditions for many nanomaterials. Because only normal forces are used for mechanical interfacing, the two chips are not permanently connected, allowing exchange of the test coupon chips. The actuated test platform chip contains a thermal actuator driving a compliant displacement amplification transmission, and a bulk-micromachined well in which the test coupon chips may be placed and removed. The displacement amplification structure provides 40 mu m of output displacement, extending a probe over the well and into contact with the test coupon. The test coupon contains compliant structures that are actuated by the probe from the test platform.