Synthesis and characterization of Au-Ta nanocomposites for nanomechanical cantilever devices
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- Synthesis and characterization of Au-Ta nanocomposites for nanomechanical cantilever devices
- Nelson-Fitzpatrick, N.; Ophus, C.; Luber, E.; Gervais, L.; Lee, Zonghoon; Radmilovic, V.; Mitlin, D.; Evoy, S.
- Face centered cubic (FCC) structure; Nanomechanical cantilever devices; Optical interferometry
- Issue Date
- IOP PUBLISHING LTD
- NANOTECHNOLOGY, v.18, no.35, pp.1 - 7
- A gold-tantalum nanocomposite material synthesized using a co-sputtering technique and designed specifically for nanomechanical systems applications is reported. X-ray diffraction, atomic force microscopy, scanning electron microscopy, nanoindentation and four-point probe contact measurements were performed to characterize the bulk and surface characteristics of the films. The films exhibited an increased reduced modulus and hardness as well as a significant grain size reduction while retaining the face-centered cubic (FCC) structure of pure gold with a very strong texture. In addition, the mechanical characterization of a number of 800 nm wide, 50 nm thick Au-5 at.% Ta cantilevers was performed using optical interferometry. Such devices exhibited resonant frequencies ranging from 371 kHz to 10.9 MHz, with resonant qualities as high as Q = 640.
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