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Author

Lee, Zonghoon
Atomic-Scale Electron Microscopy (ASEM) Lab
Research Interests
  • Advanced Transmission Electron Microscopy (TEM/STEM), in Situ TEM, graphene, 2D materials, low-dimensional crystals, nanostructured materials

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Synthesis and characterization of Au-Ta nanocomposites for nanomechanical cantilever devices

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Title
Synthesis and characterization of Au-Ta nanocomposites for nanomechanical cantilever devices
Author
Nelson-Fitzpatrick, N.Ophus, C.Luber, E.Gervais, L.Lee, ZonghoonRadmilovic, V.Mitlin, D.Evoy, S.
Keywords
Face centered cubic (FCC) structure; Nanomechanical cantilever devices; Optical interferometry
Issue Date
200709
Publisher
IOP PUBLISHING LTD
Citation
NANOTECHNOLOGY, v.18, no.35, pp.1 - 7
Abstract
A gold-tantalum nanocomposite material synthesized using a co-sputtering technique and designed specifically for nanomechanical systems applications is reported. X-ray diffraction, atomic force microscopy, scanning electron microscopy, nanoindentation and four-point probe contact measurements were performed to characterize the bulk and surface characteristics of the films. The films exhibited an increased reduced modulus and hardness as well as a significant grain size reduction while retaining the face-centered cubic (FCC) structure of pure gold with a very strong texture. In addition, the mechanical characterization of a number of 800 nm wide, 50 nm thick Au-5 at.% Ta cantilevers was performed using optical interferometry. Such devices exhibited resonant frequencies ranging from 371 kHz to 10.9 MHz, with resonant qualities as high as Q = 640.
URI
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DOI
http://dx.doi.org/10.1088/0957-4484/18/35/355303
ISSN
0957-4484
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