Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. % Mo amorphous-nanocrystalline metallic composites
Cited 3 times inCited 2 times in
- Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. % Mo amorphous-nanocrystalline metallic composites
- Ophus, C.; Fitzpatrick, N. Nelson; Lee, Zonghoon; Luber, E.; Harrower, C.; Westra, K.; Dahmen, U.; Radmilovic, V.; Evoy, S.; Mitlin, D.
- TEMPERATURE; CANTILEVERS; GLASSES; ALUMINA
- Issue Date
- AMER INST PHYSICS
- APPLIED PHYSICS LETTERS, v.92, no.12, pp.1 - 3
- This study details the resonance properties of 20 nm thick nanoelectromechanical system scale cantilevers fabricated from a metallic Al-32 at. %Mo nanocomposite. The advantage of the Al-32 at. %Mo alloy is that its strength and near-atomic surface smoothness enable fabrication of single-anchored metallic cantilevers with extreme length-to-thickness ratios, as high as 400:1. This yields uniquely compliant structures with exquisite force sensitivity. For example, an 8 μm long, 20 nm thick Al-32 at. %Mo device has a spring constant of K280 μNm. We show through transmission electron microscope analysis and continuum modeling that the relevant damping mechanisms are related to the device microstructure.
- ; Go to Link
Appears in Collections:
- MSE_Journal Papers
- Files in This Item:
can give you direct access to the published full text of this article. (UNISTARs only)
Show full item record
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.