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Lee, Zonghoon
Atomic-Scale Electron Microscopy (ASEM) Lab
Research Interests
  • Advanced Transmission Electron Microscopy (TEM/STEM), in Situ TEM, graphene, 2D materials, low-dimensional crystals, nanostructured materials

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Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. % Mo amorphous-nanocrystalline metallic composites

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Title
Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. % Mo amorphous-nanocrystalline metallic composites
Author
Ophus, C.Fitzpatrick, N. NelsonLee, ZonghoonLuber, E.Harrower, C.Westra, K.Dahmen, U.Radmilovic, V.Evoy, S.Mitlin, D.
Keywords
TEMPERATURE; CANTILEVERS; GLASSES; ALUMINA
Issue Date
200803
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v.92, no.12, pp.1 - 3
Abstract
This study details the resonance properties of 20 nm thick nanoelectromechanical system scale cantilevers fabricated from a metallic Al-32 at. %Mo nanocomposite. The advantage of the Al-32 at. %Mo alloy is that its strength and near-atomic surface smoothness enable fabrication of single-anchored metallic cantilevers with extreme length-to-thickness ratios, as high as 400:1. This yields uniquely compliant structures with exquisite force sensitivity. For example, an 8 μm long, 20 nm thick Al-32 at. %Mo device has a spring constant of K280 μNm. We show through transmission electron microscope analysis and continuum modeling that the relevant damping mechanisms are related to the device microstructure.
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DOI
http://dx.doi.org/10.1063/1.2841849
ISSN
0003-6951
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MSE_Journal Papers
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