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- Ruoff, Rodney S.
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Large Arrays and Properties of 3-Terminal Graphene Nanoelectromechanical Switches
- Author(s)
- Liu, Xinghui, Suk, Ji Won, Boddeti, Narasimha G., Cantley, Lauren, Wang, Luda, Gray, Jason M., Hall, Harris J., Bright, Victor M., Rogers, Charles T., Dunn, Martin L., Ruoff, Rodney S., Bunch, J. Scott
- Issued Date
- 2014-03
- Citation
- ADVANCED MATERIALS, v.26, no.10, pp.1571 - 1576
- Abstract
- Large arrays of 3‐terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non‐linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.
- Publisher
- WILEY-V C H VERLAG GMBH
- ISSN
- 0935-9648
- Keyword (Author)
- graphene, nanoelectromechanical systems, microsystems, nanomechanical switches, finite element analysis
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