dc.citation.conferencePlace |
PO |
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dc.citation.conferencePlace |
Estoril; Portugal |
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dc.citation.endPage |
319 |
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dc.citation.startPage |
316 |
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dc.citation.title |
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 |
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dc.contributor.author |
Shin, Heungjoo |
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dc.contributor.author |
Lee, Yunjeong |
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dc.contributor.author |
Lim, Yeongjin |
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dc.date.accessioned |
2023-12-19T23:06:17Z |
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dc.date.available |
2023-12-19T23:06:17Z |
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dc.date.created |
2015-07-01 |
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dc.date.issued |
2015-01-21 |
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dc.description.abstract |
We introduce a novel batch fabrication technique of a monolithic carbon mold for producing a mixed-scale polydimethylsiloxane (PDMS) channel network consisting of nanochannels and microchannels with micro-pillars. Nano- fluidics has attracted much attention because of their distinguishing properties. However, the research on the nanofluidics is limited by complex nanofabrication techniques. In this paper, a mixed-scale monolithic carbon mold was simply fabricated using a batch carbon-MEMS process consisting of two successive UV-lithography processes and a single pyrolysis. Then, PDMS channel networks was completed by soft molding process. By modulating pyrolysis conditions, the surface energy of the pyrolyzed carbon mold could be optimized for efficient PDMS channel demolding. |
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dc.identifier.bibliographicCitation |
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, pp.316 - 319 |
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dc.identifier.doi |
10.1109/MEMSYS.2015.7050952 |
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dc.identifier.issn |
10846999 |
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dc.identifier.scopusid |
2-s2.0-84931047502 |
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dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/46670 |
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dc.identifier.url |
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7050952 |
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dc.language |
영어 |
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dc.publisher |
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 |
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dc.title |
Fabrication of a monolithic carbon mold for producing a mixed-scale PDMS channel network using a single molding process |
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dc.type |
Conference Paper |
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dc.date.conferenceDate |
2015-01-18 |
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