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DC Field | Value | Language |
---|---|---|
dc.citation.endPage | 7 | - |
dc.citation.number | 10 | - |
dc.citation.startPage | 1 | - |
dc.citation.title | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | - |
dc.citation.volume | 23 | - |
dc.contributor.author | Nam, Yoonkwang | - |
dc.contributor.author | Kim, Minseok | - |
dc.contributor.author | Kim, Taesung | - |
dc.date.accessioned | 2023-12-22T03:36:47Z | - |
dc.date.available | 2023-12-22T03:36:47Z | - |
dc.date.created | 2013-10-24 | - |
dc.date.issued | 2013-10 | - |
dc.description.abstract | Most polymer-replica-based microfluidic devices are mainly fabricated by using standard soft-lithography technology so that multi-level masters (MLMs) require multiple spin-coatings, mask alignments, exposures, developments, and bakings. In this paper, we describe a simple method for fabricating MLMs for planar microfluidic channels with multi-level barriers (MLBs). A single photomask is necessary for standard photolithography technology to create a polydimethylsiloxane grey-scale photomask (PGSP), which adjusts the total amount of UV absorption in a negative-tone photoresist via a wide range of dye concentrations. Since the PGSP in turn adjusts the degree of cross-linking of the photoresist, this method enables the fabrication of MLMs for an MLB-integrated microfluidic device. Since the PGSP-based soft-lithography technology provides a simple but powerful fabrication method for MLBs in a microfluidic device, we believe that the fabrication method can be widely used for micro total analysis systems that benefit from MLBs. We demonstrate an MLB-integrated microfluidic device that can separate microparticles. | - |
dc.identifier.bibliographicCitation | JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.23, no.10, pp.1 - 7 | - |
dc.identifier.doi | 10.1088/0960-1317/23/10/105015 | - |
dc.identifier.issn | 0960-1317 | - |
dc.identifier.scopusid | 2-s2.0-84884552722 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/4243 | - |
dc.identifier.url | http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84884552722 | - |
dc.identifier.wosid | 000324672700016 | - |
dc.language | 영어 | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.title | Fabricating a multi-level barrier-integrated microfluidic device using grey-scale photolithography | - |
dc.type | Article | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Physics, Applied | - |
dc.relation.journalResearchArea | Engineering; Science & Technology - Other Topics; Instruments & Instrumentation; Physics | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordPlus | SINGLE-EXPOSURE PHOTOLITHOGRAPHY | - |
dc.subject.keywordPlus | GRAYSCALE MASKS | - |
dc.subject.keywordPlus | SYSTEM | - |
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